|
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|
 |
|
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|
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|
|
 |
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|
|
|
|
|
|
STANDARD CLEAN SERIES
|
BACK |
|
(particles/ml)
|
|
|
|
interval
|
Particle Size
|
|
0.2µm<
|
0.3µm<
|
0.5µm<
|
|
at filling
|
10.4
|
1.7
|
0.1
|
|
at 1 week
|
14.7
|
2.5
|
0.2
|
|
at 2 week
|
16.4
|
3.1
|
0.2
|
|
at 4 week
|
19.0
|
3.7
|
0.3
|
|
|
|
Rion KL+22 Particle Counter: Distilled Water prepared using method LV-608 (established by Toray Co., Ltd.) |
|
|
|
|
|
|
|
CB BOTTLES
|
BACK |
|
(particles/ml)
|
|
|
|
interval
|
Particle Size
|
|
0.2µm<
|
0.3µm<
|
0.5µm<
|
|
at filling
|
10.8
|
1.9
|
0.1
|
|
at 1 week
|
15.9
|
3.1
|
0.3
|
|
at 2 week
|
18.7
|
3.8
|
0.4
|
|
at 4 week
|
21.5
|
4.2
|
0.4
|
|
|
|
Rion KL+22 Particle Counter: Distilled Water prepared using method LV-608 (established by Toray Co., Ltd.) |
|
|
|
|
|
|
|
CLEAN DRUMS
|
BACK |
|
(particles/ml)
|
|
|
|
|
interval
|
Particle Size
|
|
0.2µm<
|
0.3µm<
|
0.5µm<
|
|
at filling
|
8.8
|
1.3
|
0.0
|
|
at 1 week
|
9.9
|
1.6
|
0.0
|
|
at 2 week
|
11.3
|
2.0
|
0.0
|
|
at 4 week
|
13.6
|
2.4
|
0.1
|
|
|
|
Rion KL+22 Particle Counter: Distilled Water prepared using method LV-608 (established by Toray Co., Ltd.) |
|
|
|
|
|
|
|
 |
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|
 |
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